THK | Semiconductor Manufacturing Equipment

Semiconductor manufacturing operates at the absolute frontier of precision — where component features are measured in nanometers and any deviation in motion performance can render an entire wafer unusable. THK's linear motion components are engineered for the extraordinary demands of semiconductor fabrication and inspection equipment, providing the micron-level accuracy, ultra-smooth motion, and vibration-free performance that wafer handling, lithography, etching, and inspection systems require. THK's products are designed to perform reliably in the cleanroom environments central to semiconductor manufacturing, with options for vacuum-compatible materials, low-particle generation, and chemical-resistant coatings that meet the strict contamination control standards of the industry. As chip geometries continue to shrink and the complexity of semiconductor equipment increases, the performance requirements placed on every motion component become even more stringent. THK's deep experience in precision motion for the semiconductor industry — combined with a product lineup that spans ultra-precision guides, high-lead ball screws, and integrated positioning systems — makes THK a critical technology partner for equipment manufacturers driving the next generation of semiconductor innovation.

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Ball Screw

The Ball Screw is a high-efficiency feed screw with the ball making a rolling motion between the screw axis and the nut. Compared with a conventional sliding screw, this product has drive torque of one-third or less, making it most suitable for saving drive motor power.

Ball Spline

The Ball Spline is a rolling guide spline bearing. This is an innovative product with a ball rolling on a groove connected to the shaft, realizing allowable loads greater than with linear bushing and enabling torque transmission while making linear movements.

Cam Follower

The Cam Follower is a compact bearing with a high-rigidity shaft and a built-in needle bearing. Most suitable as a guide roller for cam mechanisms and linear motion of automated machines and dedicated machines.

Cross Roller Guide

The Cross Roller Guide is a limited stroke linear guide that has precision rollers orthogonalized alternately. This product provides rigid yet supple linear motion and is particularly suitable for linear guidance where high rigidity and supple movement is demanded.

Cross Roller Ring

With the Cross-Roller Ring, cylindrical rollers are arranged crosswise, with each roller perpendicular to the adjacent roller, in a 90゜V groove, separated from each other by a spacer retainer. This design allows just single bearing to receive loads in all directions including, radial, axial and moment loads. Since the Cross-Roller Ring achieves high rigidity despite the minimum possible dimensions of the inner and outer rings, it is optimal for applications such as joints and swiveling units of industrial robots, swiveling tables of machining centers, rotary units of manipulators, precision rotary tables, medical equipment, measuring instruments and IC manufacturing machines.

Linear Actuators

Actuators simplify the design and construction of systems by combining separate components, including Linear Motion Guides, drive system (ball screw, belt, or rack & pinion), and base frame, into one part.
This simplification results in a very compact design as well as significant cost savings. Actuators are a very easy way to quickly build up multi-axis systems, streamlining design time, and allowing to focus on performance instead of implementation.

Linear Motion Guide

The LM Guide (Linear Motion Guide) is our main product, incorporating a part with a linear rolling motion into practical usage for the first time in the world. It realizes the development of high-precision, high-rigidity, energy-saving, high-speed machines with long service lives.

Lubrication

An assortment of lubrication associated products is available to maintain sufficient lubrication of machines.

Roller Follower

The Roller Follower is a compact and highly rigid bearing system. It contains needle bearings and is used as a guide roller for cam discs and straight motion. Since its outer ring rotates while keeping direct contact with the mating surface, this product is thickwalled and designed to bear an impact load.